Dark Field(暗(àn)場缺陷檢測)
91av半導體專注於半導體工藝設(shè)備的(de)研發、製造、銷售及售(shòu)後一體化服務,提供半導體廠商工藝(yì)設備的一(yī)站式(shì)解決方案(àn)。
關鍵詞:
半導體(tǐ)設備、半導體工藝
所屬分類:
產品描述
Dark Field detectors collect scattered light over a large angular range, which provides high sensitivity for detection of small defects. Particles, scratches, missing patterns, as well as other surface contamination and pattern anomalies on the surface of the wafer scatter the incident laser light in various understood patterns.
相關產品
產品詢價